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Product overview
Magnetron sputtering forms an orthogonal electromagnetic field above the surface of the cathode target. When the secondary electrons generated by sputtering are accelerated into high-energy electrons in the falling region of the cathode, they do not fly directly to the cathode but in the orthogonal electromagnetic field. Under the action, the high-energy electrons continuously collide with gas molecules and transfer energy to the latter, making them ionize and turning themselves into low-energy electrons, eliminating the bombardment of high-energy electrons on the substrate.

Technical parameter

Device model	VLT-1000	VLT-1200	VLT-1300
Coating room size	Φ1000×1250	Φ1200×1250	Φ1300×1500
Ultimate vacuum	10-4Pa	10-4Pa	10-4Pa
Pump down time	No-load normal temperature pumping to 5×10-3Pa＜10min
Film thickness meter	Configure vibration thickness gauge
Evaporation source	Resistance evaporation
Student target	One pair (intermediate frequency)
Cylindrical target	One
High pressure bombardment	3000V 600MA	3000V 600MA	3000V 300MA
Workpiece bias	1000V 20A 500 40A	1000V 20A 500 40A	1000V 30A 500 60A
Workpiece rotation method	Single/6/8 revolution revolution planetary gear structure
Configure the unit	K-600、ZJP300	K-600、ZJP300	K-800、ZJ600
	2X-70	2X-70	2X-70
Inflation system	Gas mass flow controller
Baking temperature	350℃
Control system configuration	Automatic control PLC and touch screen

Note: The configuration with * is returned by the user, and other specifications can be customized by the user

Equipment principle diagram

Magnetron cathode
Equipped with optimized magnetron cathode between poles. For ordinary reflective coating applications, the equipment will be equipped with intermediate frequency stations for working cleaning, plasma enhanced chemical vapor deposition bottom protective coating, high-rate sputtering evaporation coating, plasma enhanced chemical vapor deposition surface protective coating and other corresponding films Layer craft room.

Fully automatic process control and integration
The hardware and software design of the equipment can be organically combined with the conveyor belt of the customer's production line. The conveyor belt is responsible for transferring the workpiece rack to the loading station of the equipment, thereby transferring the workpiece to the coating station of the equipment. When the workpiece enters the unloading station, the conveyor belt receives the workpiece rack and transfers the workpiece to the next production position. The equipment passes and The precise coordination of the conveyor belt helps customers further improve production efficiency, reduce production costs and increase productivity.

Satisfy customers' high production requirements
The control system including the man-machine dialogue interface can provide fault diagnosis, alarm function and data log management. The installation positions of the various components of the equipment, such as cathodes, driving devices, and valves, fully take into account the needs of maintenance and repair work. The design, material selection and manufacturing of the model fully reflect the Vilit vacuum equipment guidelines.